Gwang-Ho Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gwang-Ho Choi returned 2 record(s).

Number	Title
1	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator
2	High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiN_x MIS structure