Inductively coupled plasma sources from Plasma ALD, LLC.


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C. Rodenbücher Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by C. Rodenbücher returned 2 record(s).

NumberTitle
1Forming-free metal-oxide ReRAM by oxygen ion implantation process
2Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices