Yu-Tung Yin Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Yu-Tung Yin returned 4 record(s).

Number	Title
1	Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks
2	Sub-7-nm textured ZrO2 with giant ferroelectricity
3	Sub-nanometer heating depth of atomic layer annealing
4	Suppression of GeOx interfacial layer and enhancement of the electrical performance of the high-K gate stack by the atomic-layer-deposited AlN buffer layer on Ge metal-oxide-semiconductor devices