Inga Anita Fischer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Inga Anita Fischer returned 3 record(s).

Number	Title
1	Vertical Ge and GeSn heterojunction gate-all-around tunneling field effect transistors
2	Device performance tuning of Ge gate-all-around tunneling field effect transistors by means of GeSn: Potential and challenges
3	Hanle-effect measurements of spin injection from Mn₅Ge₃C_0.8/Al₂O₃-contacts into degenerately doped Ge channels on Si