Inductively coupled plasma sources from Plasma ALD, LLC.


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Sung-Wook Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sung-Wook Kim returned 2 record(s).

NumberTitle
1Improvement of Copper Diffusion Barrier Properties of Tantalum Nitride Films by Incorporating Ruthenium Using PEALD
2Improvement of Morphological Stability of PEALD-Iridium Thin Films by Adopting Two-Step Annealing Process