Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Deirdre L. Olynick Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Deirdre L. Olynick returned 3 record(s).

NumberTitle
1Plasma-enhanced atomic layer deposition for plasmonic TiN
2Atomic layer deposition for spacer defined double patterning of sub-10 nm titanium dioxide features
3Toward an integrated device for spatiotemporal superposition of free-electron lasers and laser pulses