Norihiko Ikeda Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Norihiko Ikeda returned 3 record(s).

Number	Title
1	Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
2	Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
3	Ferroelectricity of Hf_xZr_1-xO₂ thin films fabricated by 300°C low temperature process with plasma-enhanced atomic layer deposition