Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Benoit Hackens Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Benoit Hackens returned 2 record(s).

NumberTitle
1Damage evaluation in graphene underlying atomic layer deposition dielectrics
2Using top graphene layer as sacrificial protection during dielectric atomic layer deposition