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Kenji Itoh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenji Itoh returned 2 record(s).

NumberTitle
1Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
2Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device