Kenji Itoh Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenji Itoh returned 2 record(s).

Number	Title
1	Al2O3/SiO2 nanolaminate for a gate oxide in a GaN-based MOS device
2	Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy