Sang-Kyun Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sang-Kyun Park returned 4 record(s).

Number	Title
1	Correlation of carbon content with the thermal stability of ruthenium deposited by using RF-direct plasma-enhanced atomic-layer deposition
2	Characteristics of high-k dielectric ECR-ALD lanthanum hafnium oxide (LHO) films
3	Lanthanum-Oxide Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
4	Comparison of the Deposition Characteristics and Electrical Properties for La₂O₃, HfO₂ and LHO Films