Inductively coupled plasma sources from Plasma ALD, LLC.


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E. F. C. Driessen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by E. F. C. Driessen returned 3 record(s).

NumberTitle
1Microwave properties of superconducting atomic-layer deposited TiN films
2Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films
3Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics