Inductively coupled plasma sources from Plasma ALD, LLC.


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Min Li Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Min Li returned 2 record(s).

NumberTitle
1Low temperature depositions of GaN thin films by plasma-enhanced atomic layer deposition
2Comparison of chemical stability and corrosion resistance of group IV metal oxide films formed by thermal and plasma-enhanced atomic layer deposition