Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Kentaro Shibahara Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kentaro Shibahara returned 2 record(s).

NumberTitle
1Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy
2Atomic layer controlled deposition of silicon nitride with self-limiting mechanism