Inductively coupled plasma sources from Plasma ALD, LLC.


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Günther Leising Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Günther Leising returned 2 record(s).

NumberTitle
1ZnO Thin Films Grown by Plasma-Enhanced Atomic Layer Deposition: Material Properties Within and Outside the "Atomic Layer Deposition Window"
2Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature