Young-Chul Byun Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Young-Chul Byun returned 3 record(s).

Number	Title
1	Theoretical and Experimental Investigation of Graphene/High-κ/p-Si Junctions
2	Interfacial Self-Cleaning during PEALD HfO₂ Process on GaAs Using TDMAH/O₂ with Different (NH₄)₂S Cleaning Time
3	Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator