Mariana A. Fraga Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mariana A. Fraga returned 3 record(s).

Number	Title
1	MOS Capacitance Measurements for PEALD TiO₂ Dielectric Films Grown under Different Conditions and the Impact of Al₂O₃ Partial-Monolayer Insertion
2	Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO₂ Coating
3	Relationships among growth mechanism, structure and morphology of PEALD TiO₂ films: the influence of O₂ plasma power, precursor chemistry and plasma exposure mode