Doyoung Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Doyoung Kim returned 3 record(s).

Number	Title
1	Atomic Layer Deposition of Ruthenium and Ruthenium-oxide Thin Films by Using a Ru(EtCp)₂ Precursor and Oxygen Gas
2	The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor
3	Plasma-enhanced atomic layer deposition of Co using Co(MeCp)₂ precursor