Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Sourish Banerjee Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sourish Banerjee returned 2 record(s).

NumberTitle
1Si atomic layer epitaxy based on Si2H6 and remote He plasma bombardment
2PEALD AlN: controlling growth and film crystallinity