Inductively coupled plasma sources from Plasma ALD, LLC.


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Mikhail A. Ilnitskii Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikhail A. Ilnitskii returned 2 record(s).

NumberTitle
1Biosensor properties of SOI nanowire transistors with a PEALD Al2O3 dielectric protective layer
2Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection