Ahmad Chaker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Ahmad Chaker returned 3 record(s).

Number	Title
1	Understanding the mechanisms of interfacial reactions during TiO₂ layer growth on RuO₂ by atomic layer deposition with O₂ plasma or H₂O as oxygen source
2	Control of ion energy during plasma enhanced atomic layer deposition: A new strategy for the modulation of TiN growth delay on SiO₂
3	Topographically selective deposition