Kwang-Ho Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kwang-Ho Kim returned 3 record(s).

Number	Title
1	Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
2	Fabrication and Properties of GaN MIS Capacitors with a Remote-Plasma Atomic-Layer-Deposited Al₂O₃ Gate Dielectric
3	Fabrication and properties of AlN film on GaN substrate by using remote plasma atomic layer deposition method