S. Rushworth Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by S. Rushworth returned 3 record(s).

Number	Title
1	Plasma-Enhanced ALD of TiO₂ Using a Novel Cyclopentadienyl Alkylamido Precursor [Ti(CpMe)(NMe₂)₃] and O₂ Plasma
2	Island Coalescence during Film Growth: An Underestimated Limitation of Cu ALD
3	Atomic layer deposition of Ru from CpRu(CO)₂Et using O₂ gas and O₂ plasma