Elisabeth Blanquet Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Elisabeth Blanquet returned 4 record(s).

Number	Title
1	Aluminum nitride thin films deposited by hydrogen plasma enhanced and thermal atomic layer deposition
2	Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient
3	PEALD ZrO₂ Films Deposition on TiN and Si Substrates
4	Tetragonal Zirconia Stabilization by Metal Addition for Metal-Insulator-Metal Capacitor Applications