Thomas W. Kenny Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Thomas W. Kenny returned 4 record(s).

Number	Title
1	Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
2	Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
3	Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops
4	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition