Timothy S. English Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Timothy S. English returned 4 record(s).

Number	Title
1	Electrical Properties of Ultrathin Platinum Films by Plasma-Enhanced Atomic Layer Deposition
2	Serpentine geometry for enhanced performance of nanometer-thin platinum bolometers
3	Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide
4	Parallel preparation of plan-view transmission electron microscopy specimens by vapor-phase etching with integrated etch stops