Salvatore Di Franco Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Salvatore Di Franco returned 5 record(s).

Number	Title
1	Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3 gate dielectric thin films
2	Comparison between thermal and plasma enhanced atomic layer deposition processes for the growth of HfO2 dielectric layers
3	Atomic Layer Deposition of Al2O3 Thin Films for Metal Insulator Semiconductor Applications on 4H-SiC
4	Structural and electrical properties of AlN thin films on GaN substrates grown by plasma enhanced-Atomic Layer Deposition
5	Advances in the fabrication of graphene transistors on flexible substrates