Andrew D. Koehler Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andrew D. Koehler returned 5 record(s).

Number	Title
1	Atomic Layer Epitaxy AlN for Enhanced AlGaN/GaN HEMT Passivation
2	Investigation of AlGaN/GaN HEMTs Passivated by AlN Films Grown by Atomic Layer Epitaxy
3	Practical Challenges of Processing III-Nitride/Graphene/SiC Devices
4	Phase Control of Crystalline Ga₂O₃ Films by Plasma-Enhanced Atomic Layer Deposition
5	ALD TiN Schottky Gates for Improved Electrical and Thermal Stability in III-N Devices