Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Evgeni Il'ichev Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Evgeni Il'ichev returned 2 record(s).

NumberTitle
1Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition
2Wafer-level uniformity of atomic-layer-deposited niobium nitride thin films for quantum devices