Gyu-Jin Choi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Gyu-Jin Choi returned 3 record(s).

Number	Title
1	Plasma-Enhanced Atomic Layer Deposition of TiO₂ and Al-Doped TiO₂ Films Using N₂O and O₂ Reactants
2	The Formation of an Almost Full Atomic Monolayer via Surface Modification by N₂O-Plasma in Atomic Layer Deposition of ZrO₂ Thin Films
3	Substrate Dependent Growth Rate of Plasma-Enhanced Atomic Layer Deposition of Titanium Oxide Using N₂O Gas