Akinwumi A. Amusan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Akinwumi A. Amusan returned 2 record(s).

Number	Title
1	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
2	Ag films grown by remote plasma enhanced atomic layer deposition on different substrates