Inductively coupled plasma sources from Plasma ALD, LLC.


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Chanwon Jung Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chanwon Jung returned 3 record(s).

NumberTitle
1Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma
2Remote plasma atomic layer deposition of silicon nitride with bis(dimethylaminomethyl-silyl)trimethylsilyl amine and N2 plasma for gate spacer
3Carbon content control of silicon oxycarbide film with methane containing plasma