Do Youl Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Do Youl Kim returned 3 record(s).

Number	Title
1	Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes
2	Remote plasma enhanced atomic layer deposition of TiN thin films using metalorganic precursor
3	Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH₃ Plasma