Patrice Gonon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Patrice Gonon returned 4 record(s).

Number	Title
1	Sub-10-nm ferroelectric Gd-doped HfO₂ layers
2	Understanding the mechanisms of interfacial reactions during TiO₂ layer growth on RuO₂ by atomic layer deposition with O₂ plasma or H₂O as oxygen source
3	Low-frequency dielectric properties of intrinsic and Al-doped rutile TiO₂ thin films grown by the atomic layer deposition technique
4	Rutile-structured TiO₂ deposited by plasma enhanced atomic layer deposition using tetrakis(dimethylamino)titanium precursor on in-situ oxidized Ru electrode