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Your search for plasma enhanced atomic layer deposition publications authored by Qi-Ye Wen returned 2 record(s).
| Number | Title |
|---|---|
| 1 | Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films |
| 2 | Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers |