Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Qi-Ye Wen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Qi-Ye Wen returned 2 record(s).

NumberTitle
1Effect of Al2O3 Buffer Layers on the Properties of Sputtered VO2 Thin Films
2Tuning the phase transitions of VO2 thin films on silicon substrates using ultrathin Al2O3 as buffer layers