Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

Jill S. Becker Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jill S. Becker returned 2 record(s).

NumberTitle
1Plasma-Enabled ALD of Niobium Nitride Using an Organometallic Nb Precursor
2Conformal Fe, Co and Ni Films from Oxides and Nitrides Grown by Atomic Layer Deposition