Inductively coupled plasma sources from Plasma ALD, LLC.


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Doo-In Kim Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Doo-In Kim returned 2 record(s).

NumberTitle
1Improved Oxygen Diffusion Barrier Properties of Ruthenium-Titanium Nitride Thin Films Prepared by Plasma-Enhanced Atomic Layer Deposition
2Plasma-enhanced atomic layer deposition of Ir thin films for copper adhesion layer