Hee Ok Park Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Hee Ok Park returned 3 record(s).

Number	Title
1	Remote Plasma-Enhanced Atomic-Layer Deposition of TiN by Using TDMAT with a NH₃ Plasma
2	Barrier Characteristics of TaN Films Deposited by Using the Remote Plasma Enhanced Atomic Layer Deposition Method
3	Characteristics and Compositional Variation of TiN Films Deposited by Remote PEALD on Contact Holes