Roland A. Fischer Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Roland A. Fischer returned 2 record(s).

Number	Title
1	Evaluation of NbN thin films grown by MOCVD and plasma-enhanced ALD for gate electrode application in high-k/SiO₂ gate stacks
2	Electrical and optical properties of TiO₂ thin films prepared by plasma-enhanced atomic layer deposition