Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Tom Blomberg Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tom Blomberg returned 3 record(s).

NumberTitle
1Atomic Layer Deposition: An Enabling Technology for Microelectronic Device Manufacturing
2Film Uniformity in Atomic Layer Deposition
3Low-Temperature Low-Resistivity PEALD TiN Using TDMAT under Hydrogen Reducing Ambient