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Valentino Longo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Valentino Longo returned 6 record(s).

NumberTitle
1Influence of stoichiometry on the performance of MIM capacitors from plasma-assisted ALD SrxTiyOz films
2Crystallization Study by Transmission Electron Microscopy of SrTiO3 Thin Films Prepared by Plasma-Assisted ALD
3Impact of composition and crystallization behavior of atomic layer deposited strontium titanate films on the resistive switching of Pt/STO/TiN devices
4Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
5Atomic layer deposition of HfO2 using HfCp(NMe2)3 and O2 plasma
6Plasma-Assisted Atomic Layer Deposition of SrTiO3: Stoichiometry and Crystallinity Studied by Spectroscopic Ellipsometry