Inductively coupled plasma sources from Plasma ALD, LLC.


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Michael J. Manfra Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Michael J. Manfra returned 2 record(s).

NumberTitle
1Capacitance spectroscopy of gate-defined electronic lattices
2Gate-tunable high mobility remote-doped InSb/In1-xAlxSb quantum well heterostructures