A.M. Mahajan Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by A.M. Mahajan returned 6 record(s).

Number	Title
1	Interfacial and electrical properties of Al₂O₃/HfO₂ bilayer deposited by atomic layer deposition on GeON passivated germanium surface
2	XPS study of homemade plasma enhanced atomic layer deposited La₂O₃/ZrO₂ bilayer thin films
3	Structural and electrical properties of ultra-thin high-k ZrO₂ film on nitride passivated Ge(100) prepared by PEALD
4	Electrical properties of MOS capacitors formed by PEALD grown Al₂O₃ on silicon
5	PEALD grown high-k ZrO₂ thin films on SiC group IV compound semiconductor
6	High Dielectric Constant ZrO₂ Films by Atomic Layer Deposition Technique on Germanium Substrates