Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


Contact us for more information.

P. C. J. J. Coumou Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by P. C. J. J. Coumou returned 3 record(s).

NumberTitle
1Strongly Disordered TiN and NbTiN s-Wave Superconductors Probed by Microwave Electrodynamics
2Microwave properties of superconducting atomic-layer deposited TiN films
3Electrodynamic response and local tunneling spectroscopy of strongly disordered superconducting TiN films