Chin-Lung Kuo Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Chin-Lung Kuo returned 3 record(s).

Number	Title
1	In situ atomic layer nitridation on the top and down regions of the amorphous and crystalline high-K gate dielectrics
2	Effect of hydrogen participation on the improvement in electrical characteristics of HfO₂ gate dielectrics by post-deposition remote N₂ , N₂/H₂, and NH₃ plasma treatments
3	Improvement in electrical characteristics of HfO₂ gate dielectrics treated by remote NH₃ plasma