Inductively coupled plasma sources from Plasma ALD, LLC.


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Shin Yokoyama Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Shin Yokoyama returned 3 record(s).

NumberTitle
1Atomic layer controlled deposition of silicon nitride with self-limiting mechanism
2Atomic-layer selective deposition of silicon nitride on hydrogen-terminated Si surfaces
3Atomic layer controlled deposition of silicon nitride and in situ growth observation by infrared reflection absorption spectroscopy