JSW-Afty AFTEX-600 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using JSW-Afty AFTEX-600 hardware returned 3 records.

Number	Title
1	Dimethylaluminum hydride for atomic layer deposition of Al2O3 passivation for amorphous InGaZnO thin-film transistors
2	Bias stress and humidity exposure of amorphous InGaZnO thin-film transistors with atomic layer deposited Al2O3 passivation using dimethylaluminum hydride at 200°C
3	Characterizations of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition