ASM Eagle 12 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using ASM Eagle 12 hardware returned 4 records.

Number	Title
1	Low temperature deposition of 2D WS₂ layers from WF₆ and H₂S precursors: impact of reducing agents
2	WS₂ transistors on 300 mm wafers with BEOL compatibility
3	Nucleation mechanism during WS₂ plasma enhanced atomic layer deposition on amorphous Al₂O₃ and sapphire substrates
4	Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS₂ from WF₆, H₂ Plasma, and H₂S