Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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GeSbTe Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing GeSbTe films returned 3 record(s).

NumberTitle
1GeSbTe deposition for the PRAM application
2Phase-change properties of GeSbTe thin films deposited by plasma-enchanced atomic layer depositon
3Plasma-assisted atomic layer deposition of germanium antimony tellurium compounds