Sb₂O₅ Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing Sb₂O₅ films returned 3 record(s).

Number	Title
1	Boosting n-Type Doping Levels of Ge With Co-Doping by Integrating Plasma-Assisted Atomic Layer Deposition and Flash Annealing Process
2	Use of B₂O₃ films grown by plasma-assisted atomic layer deposition for shallow boron doping in silicon
3	Diffusion of Phosphorus and Boron from Atomic Layer Deposition Oxides into Silicon

Sb2O5 Plasma Enhanced Atomic Layer Deposition Film Publications