MoN Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing MoN films returned 2 record(s).

Number	Title
1	Plasma enhanced atomic layer deposition of titanium nitride-molybdenum nitride solid solutions
2	Highly-conformal nanocrystalline molybdenum nitride thin films by atomic layer deposition as a diffusion barrier against Cu